Quick answer: 3 Inch (76.2 mm) Quartz Glass Wafers covers Quartz Glass (CTE 0.59 x 10^-6 /K, 260 nm – 2.5 um); 76.2 mm format, TTV <5 um. Prototypes ship in 5-10 working days.
3 inch (76.2 mm) quartz glass wafers are supplied as finished substrates: edge-rounded, cleaned and packed in wafer cassettes. The material brings fused from natural quartz crystal and plasma and halogen resistance; the format brings SEMI-compatible handling.
Specification envelope
| Material | Quartz Glass (GE214-equivalent, semiconductor grade) |
|---|---|
| Thermal expansion (CTE) | 0.59 x 10^-6 /K |
| Service temperature | 1,050 C continuous |
| Transmission range | 260 nm – 2.5 um |
| Density | 2.20 g/cm3 |
| Knoop hardness | 500 kg/mm2 |
| Refractive index | 1.459 @ 587 nm |
| Stock thickness | 0.20 – 60 mm |
| Maximum blank size | 450 mm diameter |
| Diameter / format | 76.2 mm |
| Thickness | 0.3 – 1.0 mm typical |
| TTV | <5 um |
| Flat / notch | SEMI flat |
| RFQ inputs | PDF/DXF/STEP drawing, quantity brackets, surface and edge spec |
Process window
Beyond this page, Quartz Glass routinely runs through ultrasonic machining, dicing, drilling, double-side polishing in our shop – most real parts combine two or three of these steps.
Getting the drawing right
The shop-floor rules that matter here:
- Material note: natural-quartz batches vary in metallic ppm, so semiconductor lots need certs per melt.
- Specify flat or notch orientation relative to your device layout – regrinding orientation later scraps the wafer.
- Over-specification is the quiet budget killer: a 20/10 scratch-dig face costs roughly three times an 80/50 face, so grade each surface individually.
For the complete framework, see the tolerance design guide and the holes and edges design guide.
Where these parts end up
Orders for 3 inch (76.2 mm) quartz glass wafers cluster in semiconductor equipment (view ports, wafer carriers, plasma rings, chamber windows); laboratory instruments (cuvettes, sight glasses, stir-cell windows). Background reading on the underlying material science: ScienceDirect: quartz glass.
The fastest route to a quote is geometry: use the 3D builder below, draw a dimensioned 2D drawing from it, or open the site-wide custom glass machining 3D + 2D builder for fully custom parts.
Related reading on this site: CNC machining capability, ultra-thin quartz discs, holes and edges design guide.
Frequently asked questions
How fast can prototypes ship?
Machined prototypes ship in 5 – 10 working days. Coated or bonded parts add 1 – 2 weeks depending on queue slots.
What files do you need for a quote?
A dimensioned PDF plus DXF or STEP geometry. If only a sketch exists, our drawing review service formalizes it before quoting.
Do parts ship with inspection data?
Dimensional reports, surface certificates and material certs per melt are available; specify the level on the RFQ.
What tolerances are achievable on Quartz Glass parts?
Ground features hold +/-0.01 mm and lapped thickness reaches +/-0.003 mm. Natural-quartz batches vary in metallic ppm, so semiconductor lots need certs per melt.
Specifications on this page were last reviewed by our engineering team in September 2026.