Borofloat 33 for MEMS Devices

Borofloat 33 for MEMS Devices: Borofloat 33, CTE 3.25 x 10^-6 /K. No MOQ, prototypes in 5-10 days, DFM review with every RFQ.

Industry Application July 28, 2026

Borofloat 33 for MEMS Devices: Borofloat 33 (CTE 3.25 x 10^-6 /K, 350 nm – 2.0 um). Single-piece prototypes to production volumes, quoted from your drawing.

What borofloat 33 for mems devices actually buys from a glass shop: cap wafers, TGV substrates, motion-sensor lids. The requirement underneath is anodic-bondable wafers with tight TTV. Borofloat 33 is the fit here because it offers float-glass flatness off the line.

Key parameters

Material Borofloat 33 (SCHOTT float production, wafer grade)
Thermal expansion (CTE) 3.25 x 10^-6 /K
Service temperature 450 C continuous
Transmission range 350 nm – 2.0 um
Density 2.23 g/cm3
Knoop hardness 480 kg/mm2
Refractive index 1.471 @ 587 nm
Stock thickness 0.70 – 25.4 mm
Maximum blank size 500 x 500 mm
RFQ inputs PDF/DXF/STEP drawing, quantity brackets, surface and edge spec

Specification advice

Before sending the RFQ, check these against your drawing:

  • Material note: float tin side must be tracked when parts see coating or bonding steps.
  • Over-specification is the quiet budget killer: a 20/10 scratch-dig face costs roughly three times an 80/50 face, so grade each surface individually.

For the complete framework, see the tolerance design guide and the holes and edges design guide.

Manufacturing capability

One material, many routes: on Borofloat 33 we also quote dicing, etching, sandblasting, polishing, and multi-step drawings are the norm rather than the exception.

Application context

Orders for borofloat 33 for mems devices cluster in mems devices (cap wafers, TGV substrates, motion-sensor lids); led packaging (groove covers, phosphor carriers, package windows); microfluidic devices (chips, manifolds, via plates, bonded stacks). Background reading on the underlying material science: SCHOTT BOROFLOAT product page.

The fastest route to a quote is geometry: use the 3D builder below, draw a dimensioned 2D drawing from it, or open the site-wide custom glass machining 3D + 2D builder for fully custom parts.

Engineers scoping this work usually also review glass wafer bonding, Borofloat 33 selection guide, LED groove cover glass.

Buyer questions, answered

How does Borofloat 33 behave under heat?

CTE is 3.25 x 10^-6 /K and continuous service reaches 450 C continuous, which is what drives its use where float-glass flatness off the line matters.

What do mems devices programs usually order?

Cap wafers, TGV substrates, motion-sensor lids. Typical spec: TTV < 3 um, bow < 20 um, SEMI flats.

Is there a minimum order for borofloat 33 for mems devices?

No. Single prototypes are accepted, and pricing steps down at 10, 100 and 1,000 pieces.

How fast can prototypes ship?

Machined prototypes ship in 5 – 10 working days. Coated or bonded parts add 1 – 2 weeks depending on queue slots.

What files do you need for a quote?

A dimensioned PDF plus DXF or STEP geometry. If only a sketch exists, our drawing review service formalizes it before quoting.

Specifications on this page were last reviewed by our engineering team in August 2026.

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FREQUENTLY ASKED QUESTIONS
Which fused silica grade should I choose — JGS1, JGS2 or JGS3?

JGS1 offers deep-UV transmission from about 185 nm (best for DUV lithography and UV laser optics). JGS2 transmits well from about 220 nm for standard UV-visible use at lower cost. JGS3 is optimized for visible-to-infrared and high-power laser work. The builder exposes a transmission-band requirement so you can specify the grade by application.

What wafer diameters and thicknesses are supported?

Common diameters are 2, 3, 4 and 6 inch (note 1 inch = 25.0 mm for quartz wafers, so a 4 inch wafer is 100 mm). Typical thicknesses are 200, 500, 700 and 1000 µm, with tighter thickness tolerance and TTV specifiable for polished optical grades.

Can I specify TTV, surface quality and a flat or notch?

Yes. You can set total thickness variation, scratch-dig surface quality (down to 40/20 or 20/10 for optical grade), single- or double-side polish, and a primary flat or notch for orientation.

Need a different product family? Open the full 3D + 2D builder.

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