SKU MG-313FE8

High Purity Quartz 6inch Wafer Carrier

High Purity Quartz 6inch Wafer Carrier — a fused silica / quartz wafer: High Purity Quartz. Specs, RFQ checklist and custom sizes to drawing.

High Purity QuartzMaterial
Door CapType
GlassApplication
500Model NO.
High Purity Quartz 6inch Wafer Carrier

Product type: Door Cap. Application: Glass. Model: 500.

Overview

The High Purity Quartz 6inch Wafer Carrier is supplied as a fused silica / quartz wafer made from High Purity Quartz. It is used in Glass. Dimensions, material grade, coating and finish can be quoted to your drawing; the values above are the listed starting point.

Specifications

Material High Purity Quartz
Type Door Cap
Application Glass
Model NO. 500
Lt 2weeks
Pacakge Carton
Introduce High purity quartz tube, Carriers and spare parts for semiconductor wafer processing
Supplier Zhejiang Advanced Quartz Technology Co., Ltd

Technical data

Spec Material
Quartz Tube High purity quartz

What to specify when you request a quote

  • Diameter and flat / notch — state diameter, flat or notch and their tolerances.
  • Thickness and TTV — give thickness, its tolerance and total thickness variation.
  • Polish and roughness — specify single- or double-side polish and roughness.
  • Flatness, bow and warp — quote flatness, bow and warp limits.
  • Material grade — listed as “High Purity Quartz”; name the grade (JGS1/JGS2, Borofloat 33, alkali-free, sapphire orientation).

Engineering guides for this part

For material grades and coating options, see Fused Silica Wafer Material Selection for Precision Glass Processing. How parts like this are machined and finished is covered in Precision CNC Machining of Quartz & Fused Silica Components. For an application example, read Fused Silica Glass Wafers for Precision Appliance Electronics. Before sending a drawing, check Quartz Glass Manufacturing: Controlling Thermal Conductivity in Fused Silica. A related standard product is Fused Silica Glass Wafers (2–12", JGS1/JGS2).

FAQ

What is the High Purity Quartz 6inch Wafer Carrier made of? expand_more
It is listed as High Purity Quartz. Other grades can be quoted if your application needs different transmission, thermal or chemical properties.
Where is this fused silica / quartz wafer used? expand_more
Listed applications: Glass.
What should I include in a quote request? expand_more
Include diameter and flat / notch, thickness and ttv, polish and roughness, flatness, bow and warp and material grade, plus quantity and a drawing if the part is custom.
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FREQUENTLY ASKED QUESTIONS
Which fused silica grade should I choose — JGS1, JGS2 or JGS3?

JGS1 offers deep-UV transmission from about 185 nm (best for DUV lithography and UV laser optics). JGS2 transmits well from about 220 nm for standard UV-visible use at lower cost. JGS3 is optimized for visible-to-infrared and high-power laser work. The builder exposes a transmission-band requirement so you can specify the grade by application.

What wafer diameters and thicknesses are supported?

Common diameters are 2, 3, 4 and 6 inch (note 1 inch = 25.0 mm for quartz wafers, so a 4 inch wafer is 100 mm). Typical thicknesses are 200, 500, 700 and 1000 µm, with tighter thickness tolerance and TTV specifiable for polished optical grades.

Can I specify TTV, surface quality and a flat or notch?

Yes. You can set total thickness variation, scratch-dig surface quality (down to 40/20 or 20/10 for optical grade), single- or double-side polish, and a primary flat or notch for orientation.

Related products

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High Purity Quartz 6inch Wafer Carrier

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