Product type: Quartz Plate. Application: Glass. Model: Sapphire(Al2O3) glass wafe.
Overview
Sapphire (Al2O3) Glass Wafer Substrate 2inch 0.50mm Thickness Ssp & DSP C-Plane is a sapphire / specialty wafer made from Moonocrystalline Al2o, High Purity. Listed geometry: diameter 10mm-200mm, thickness 0.43mm-1.3mm. It is used in Glass. Dimensions, material grade, coating and finish can be quoted to your drawing; the values above are the listed starting point.
Specifications
| Material | Moonocrystalline Al2o, High Purity |
|---|---|
| Type | Quartz Plate |
| Diameter | 10mm-200mm |
| Thickness | 0.43mm-1.3mm |
| Application | Glass |
| Model NO. | Sapphire(Al2O3) glass wafe |
| Ttv | <10um |
| Warp | <20um |
| Bow | <20um |
| Surface Finish | Ssp/DSP |
| Supplier | Hangzhou Freq-Control Electronic Technology Ltd. |
Technical data
| Material | 99,999% of Al2O3,High Purity,Moonocrystalline Al2O3 | |||||
| Surface Orientation | C-plane(0001) to M-plane(1-100)or A-plane( 11-20) 0.2 +/- 0.1°, R-plane(1-102), | |||||
| Diameter/size | 2"(50.8mm) | 3"(76.2mm) | 4" (100mm) | 5" (125mm) | 6"(150mm) | 8"(200mm) |
| Tol(±) | 0.10mm | |||||
| Thickness | 430 μm +/- 25 μm | 500 μm +/- 25 μm | 650 μm +/- 25 μm | 650 μm +/- 25 μm | 1300μm +/-25 μm | 1300μm +/- 25μm |
| Primary Flat Orientatoin | A-Plane(11-20)+/- 0.2° | |||||
| Primary Flat Length | 16.0 mm +/- 1.0 mm | 22.0 mm +/- 1.0 mm | 30.0 mm +/- 1.0 mm | 42.0 mm +/- 1.0 mm | 47.0 mm +/- 1.0 mm | / |
| TTV | <10µm | <15µm | <20µm | <20µm | <25µm | <30µm |
| Bow | <10µm | <15µm | <20µm | <20µm | <25µm | <30µm |
| Warp | <10µm | <15µm | <20µm | <20µm | <25µm | <30µm |
| Surface Type | Single Side Polished /Double Sides Polished | |||||
| Polished side | Epi-polished Ra<0.2nm(by AFM) | |||||
| Back Side Criteria | Fine ground, Ra= 0.8µm -1.2µm / Epi-polished Ra<0.2nm | |||||
| Wafer Surface Criteria | Contamination, | None | ||||
| Scratch , chipping | None | |||||
| Defect | No edge cracks, scratches, saw marks, stains | |||||
| Packaging | Qty/Wafer box | Class 100 cleanroom cleaning and vacuum packaging, 25 pieces in one cassette packaging or single piece packaging. |
What to specify when you request a quote
- Diameter and flat / notch — listed as “10mm-200mm”; state diameter, flat or notch and their tolerances.
- Thickness and TTV — listed as “0.43mm-1.3mm”; give thickness, its tolerance and total thickness variation.
- Polish and roughness — listed as “Ssp/DSP”; specify single- or double-side polish and roughness.
- Flatness, bow and warp — listed as “<20um”; quote flatness, bow and warp limits.
- Material grade — listed as “Moonocrystalline Al2o, High Purity”; name the grade (JGS1/JGS2, Borofloat 33, alkali-free, sapphire orientation).
Engineering guides for this part
For material grades and coating options, see Fused Quartz Wafer Substrate Selection: Materials & Coatings for Semiconductor and Optical Systems. How parts like this are machined and finished is covered in Precision Glass Hole Drilling & Micromachining for MEMS Wafers. For an application example, read Custom Perforated Quartz Plates for Appliance Airflow Sensors. Before sending a drawing, check Technical Guide to Glass Thickness and Flatness Requirements. A related standard product is 2× 100 mm JGS1 & JGS2 Quartz Glass Sheets.
