SKU MG-E8617D

Semiconductor Wafer Carrier Quartz Insulation Base

Semiconductor Wafer Carrier Quartz Insulation Base — a fused silica / quartz wafer: High Purity. Specs, RFQ checklist and custom sizes to drawing.

High PurityMaterial
Quartz InstrumentsType
Glass, QuartzApplication
SemiconductorField
Semiconductor Wafer Carrier Quartz Insulation Base

Product type: Quartz Instruments. Application: Glass, Quartz. Function: Block.

Overview

Semiconductor Wafer Carrier Quartz Insulation Base is a fused silica / quartz wafer made from High Purity. It is used in Glass and Quartz. Dimensions, material grade, coating and finish can be quoted to your drawing; the values above are the listed starting point.

Specifications

Material High Purity
Type Quartz Instruments
Application Glass, Quartz
Field Semiconductor
Function Block
Introduce High purity quartz pedestal, Carriers and spare parts for semiconductor wafer processing.
Supplier Zhejiang Advanced Quartz Technology Co., Ltd

Technical data

Spec. Material
Quartz pedestal High Purity

What to specify when you request a quote

  • Diameter and flat / notch — state diameter, flat or notch and their tolerances.
  • Thickness and TTV — give thickness, its tolerance and total thickness variation.
  • Polish and roughness — specify single- or double-side polish and roughness.
  • Flatness, bow and warp — quote flatness, bow and warp limits.
  • Material grade — listed as “High Purity”; name the grade (JGS1/JGS2, Borofloat 33, alkali-free, sapphire orientation).

Engineering guides for this part

For material grades and coating options, see Fused Quartz Wafer Substrate Selection: Materials & Coatings for Semiconductor and Optical Systems. How parts like this are machined and finished is covered in Glass Wafer Bonding for Microfluidic and MEMS Applications: Process Overview. For an application example, read Fused Silica Glass Wafers for Precision Appliance Electronics. Before sending a drawing, check Fused Silica Refractive Index: Key to Optical Design Improvement. A related standard product is Fused Silica Glass Wafers (2–12", JGS1/JGS2).

FAQ

What is the Semiconductor Wafer Carrier Quartz Insulation Base made of? expand_more
It is listed as High Purity. Other grades can be quoted if your application needs different transmission, thermal or chemical properties.
Where is this fused silica / quartz wafer used? expand_more
Listed applications: Glass and Quartz.
What should I include in a quote request? expand_more
Include diameter and flat / notch, thickness and ttv, polish and roughness, flatness, bow and warp and material grade, plus quantity and a drawing if the part is custom.
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FREQUENTLY ASKED QUESTIONS
Which fused silica grade should I choose — JGS1, JGS2 or JGS3?

JGS1 offers deep-UV transmission from about 185 nm (best for DUV lithography and UV laser optics). JGS2 transmits well from about 220 nm for standard UV-visible use at lower cost. JGS3 is optimized for visible-to-infrared and high-power laser work. The builder exposes a transmission-band requirement so you can specify the grade by application.

What wafer diameters and thicknesses are supported?

Common diameters are 2, 3, 4 and 6 inch (note 1 inch = 25.0 mm for quartz wafers, so a 4 inch wafer is 100 mm). Typical thicknesses are 200, 500, 700 and 1000 µm, with tighter thickness tolerance and TTV specifiable for polished optical grades.

Can I specify TTV, surface quality and a flat or notch?

Yes. You can set total thickness variation, scratch-dig surface quality (down to 40/20 or 20/10 for optical grade), single- or double-side polish, and a primary flat or notch for orientation.

Related products

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Semiconductor Wafer Carrier Quartz Insulation Base

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