wafer

Dicing Quartz Glass Wafers

Dicing Quartz Glass Wafers: Quartz Glass, CTE 0.59 x 10^-6 /K; +/-0.01 mm index accuracy. No MOQ, prototypes in 5-10 days, DFM review with every RFQ.

Dicing Quartz Glass Wafers

Quick answer: Dicing Quartz Glass Wafers covers Quartz Glass (CTE 0.59 x 10^-6 /K, 260 nm – 2.5 um); Dicing to +/-0.01 mm index accuracy. Prototypes ship in 5-10 working days.

The combination of Quartz Glass and Dicing comes up constantly in RFQs for a reason – the material offers plasma and halogen resistance, and Dicing is the right way to get accurate geometry into it. Expect +/-0.01 mm index accuracy and edge chipping under 15 um.

The numbers

Material Quartz Glass (GE214-equivalent, semiconductor grade)
Thermal expansion (CTE) 0.59 x 10^-6 /K
Service temperature 1,050 C continuous
Transmission range 260 nm – 2.5 um
Density 2.20 g/cm3
Knoop hardness 500 kg/mm2
Refractive index 1.459 @ 587 nm
Stock thickness 0.20 – 60 mm
Maximum blank size 450 mm diameter
Process Dicing
Working tolerance +/-0.01 mm index accuracy
Minimum feature 30 um kerf
Surface finish edge chipping under 15 um
Thickness window 0.05 – 3 mm
Edge condition saw edge, optional etch relief
Wafer formats 2", 3", 4", 6", 8" and 12" with SEMI flats or notch
TTV under 3 – 5 um by format
RFQ inputs PDF/DXF/STEP drawing, quantity brackets, surface and edge spec

DFM notes from the shop floor

Three items decide most of the cost and lead time on this work:

  • Material note: natural-quartz batches vary in metallic ppm, so semiconductor lots need certs per melt.
  • Process boundary: straight-line cuts only; contours route to laser cutting instead.
  • Over-specification is the quiet budget killer: a 20/10 scratch-dig face costs roughly three times an 80/50 face, so grade each surface individually.

The full rules live in our tolerance design guide and holes and edges design guide.

Process window

Dicing earns its place through singulating wafers into dies with tight index accuracy and low chipping. Its boundary condition – straight-line cuts only; contours route to laser cutting instead – is the first thing our DFM review checks.

Beyond this page, Quartz Glass routinely runs through drilling, etching, edge grinding, cnc machining in our shop – most real parts combine two or three of these steps.

Typical applications

The recurring buyers of dicing quartz glass wafers: semiconductor equipment (view ports, wafer carriers, plasma rings, chamber windows); laboratory instruments (cuvettes, sight glasses, stir-cell windows). Background reading on the underlying material science: ScienceDirect: quartz glass.

Dimensions still moving? Configure this part live in the 3D + 2D builder below, or open the full custom glass machining 3D + 2D builder to start from a blank canvas.

Useful companion pages: ultra-thin glass materials, ultra-thin quartz discs, glass wafer coring.

Buyer questions, answered

What equipment runs the dicing work?

Automatic dicing saws with resin and metal-bond blades.

Is there a minimum order for dicing quartz glass wafers?

No. Single prototypes are accepted, and pricing steps down at 10, 100 and 1,000 pieces.

How fast can prototypes ship?

Machined prototypes ship in 5 – 10 working days. Coated or bonded parts add 1 – 2 weeks depending on queue slots.

What files do you need for a quote?

A dimensioned PDF plus DXF or STEP geometry. If only a sketch exists, our drawing review service formalizes it before quoting.

Do parts ship with inspection data?

Dimensional reports, surface certificates and material certs per melt are available; specify the level on the RFQ.

Specifications on this page were last reviewed by our engineering team in September 2026.

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FREQUENTLY ASKED QUESTIONS
Which fused silica grade should I choose — JGS1, JGS2 or JGS3?

JGS1 offers deep-UV transmission from about 185 nm (best for DUV lithography and UV laser optics). JGS2 transmits well from about 220 nm for standard UV-visible use at lower cost. JGS3 is optimized for visible-to-infrared and high-power laser work. The builder exposes a transmission-band requirement so you can specify the grade by application.

What wafer diameters and thicknesses are supported?

Common diameters are 2, 3, 4 and 6 inch (note 1 inch = 25.0 mm for quartz wafers, so a 4 inch wafer is 100 mm). Typical thicknesses are 200, 500, 700 and 1000 µm, with tighter thickness tolerance and TTV specifiable for polished optical grades.

Can I specify TTV, surface quality and a flat or notch?

Yes. You can set total thickness variation, scratch-dig surface quality (down to 40/20 or 20/10 for optical grade), single- or double-side polish, and a primary flat or notch for orientation.

Need a different product family? Open the full 3D + 2D builder.

Engineering Review

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Send drawings and target performance data so engineering can review geometry, material and lead time.