6 Inch (150 mm) Quartz Glass Wafers: Quartz Glass (CTE 0.59 x 10^-6 /K, 260 nm – 2.5 um); 150 mm format, TTV <3 um. Single-piece prototypes to production volumes, quoted from your drawing.
6 inch (150 mm) quartz glass wafers are supplied as finished substrates: edge-rounded, cleaned and packed in wafer cassettes. The material brings fused from natural quartz crystal and plasma and halogen resistance; the format brings SEMI-compatible handling.
Specifications at a glance
| Material | Quartz Glass (GE214-equivalent, semiconductor grade) |
|---|---|
| Thermal expansion (CTE) | 0.59 x 10^-6 /K |
| Service temperature | 1,050 C continuous |
| Transmission range | 260 nm – 2.5 um |
| Density | 2.20 g/cm3 |
| Knoop hardness | 500 kg/mm2 |
| Refractive index | 1.459 @ 587 nm |
| Stock thickness | 0.20 – 60 mm |
| Maximum blank size | 450 mm diameter |
| Diameter / format | 150 mm |
| Thickness | 0.5 – 1.1 mm |
| TTV | <3 um |
| Flat / notch | SEMI notch or flat |
| RFQ inputs | PDF/DXF/STEP drawing, quantity brackets, surface and edge spec |
Process window
Beyond this page, Quartz Glass routinely runs through etching, laser cutting, coring, dicing in our shop – most real parts combine two or three of these steps.
Specification advice
Before sending the RFQ, check these against your drawing:
- Material note: natural-quartz batches vary in metallic ppm, so semiconductor lots need certs per melt.
- Specify flat or notch orientation relative to your device layout – regrinding orientation later scraps the wafer.
- Over-specification is the quiet budget killer: a 20/10 scratch-dig face costs roughly three times an 80/50 face, so grade each surface individually.
For the complete framework, see the tolerance design guide and the holes and edges design guide.
Application context
6 inch (150 mm) quartz glass wafers shows up across semiconductor equipment (view ports, wafer carriers, plasma rings, chamber windows); laboratory instruments (cuvettes, sight glasses, stir-cell windows). Background reading on the underlying material science: ScienceDirect: quartz glass.
The fastest route to a quote is geometry: use the 3D builder below, draw a dimensioned 2D drawing from it, or open the site-wide custom glass machining 3D + 2D builder for fully custom parts.
Engineers scoping this work usually also review precision glass grinding, JGS1 quartz glass, custom FTO glass.
Common questions
How fast can prototypes ship?
Machined prototypes ship in 5 – 10 working days. Coated or bonded parts add 1 – 2 weeks depending on queue slots.
What files do you need for a quote?
A dimensioned PDF plus DXF or STEP geometry. If only a sketch exists, our drawing review service formalizes it before quoting.
Do parts ship with inspection data?
Dimensional reports, surface certificates and material certs per melt are available; specify the level on the RFQ.
What tolerances are achievable on Quartz Glass parts?
Ground features hold +/-0.01 mm and lapped thickness reaches +/-0.003 mm. Natural-quartz batches vary in metallic ppm, so semiconductor lots need certs per melt.
What thickness range do you stock for Quartz Glass?
Standard stock spans 0.20 – 60 mm, with blanks up to 450 mm diameter. Other formats are sourced per order.
Specifications on this page were last reviewed by our engineering team in September 2026.