Alkali-Free Glass for MEMS Devices

Alkali-Free Glass for MEMS Devices: Alkali-Free Glass, CTE 3.2 x 10^-6 /K. No MOQ, prototypes in 5-10 days, DFM review with every RFQ.

Industry Application July 28, 2026

Alkali-Free Glass for MEMS Devices: Alkali-Free Glass (CTE 3.2 x 10^-6 /K, 350 nm – 2.0 um). Single-piece prototypes to production volumes, quoted from your drawing.

What alkali-free glass for mems devices actually buys from a glass shop: cap wafers, TGV substrates, motion-sensor lids. The requirement underneath is anodic-bondable wafers with tight TTV. Alkali-Free Glass is the fit here because it offers no alkali ion migration into TFT or sensor layers.

The numbers

Material Alkali-Free Glass (AF32 / EAGLE-class display glass)
Thermal expansion (CTE) 3.2 x 10^-6 /K
Service temperature 600 C (Tg 717 C)
Transmission range 350 nm – 2.0 um
Density 2.43 g/cm3
Knoop hardness 590 kg/mm2
Refractive index 1.51 @ 587 nm
Stock thickness 0.10 – 1.1 mm
Maximum blank size 400 x 300 mm
RFQ inputs PDF/DXF/STEP drawing, quantity brackets, surface and edge spec

Design guidance

Three items decide most of the cost and lead time on this work:

  • Material note: thin sheets below 0.3 mm demand carrier-supported handling through every step.
  • Over-specification is the quiet budget killer: a 20/10 scratch-dig face costs roughly three times an 80/50 face, so grade each surface individually.

The full rules live in our tolerance design guide and holes and edges design guide.

Manufacturing capability

One material, many routes: on Alkali-Free Glass we also quote etching, cnc machining, drilling, double-side polishing, and multi-step drawings are the norm rather than the exception.

Who orders this

Orders for alkali-free glass for mems devices cluster in ccd inspection equipment (CCD cover plates, reference grids, stage glass); mems devices (cap wafers, TGV substrates, motion-sensor lids); industrial displays (touch covers, gauge windows, printed bezels). Background reading on the underlying material science: SCHOTT AF 32 eco.

The fastest route to a quote is geometry: use the 3D builder below, draw a dimensioned 2D drawing from it, or open the site-wide custom glass machining 3D + 2D builder for fully custom parts.

Related reading on this site: alkali-free display glass, glass hole micromachining, infrared windows.

Buyer questions, answered

How does Alkali-Free Glass behave under heat?

CTE is 3.2 x 10^-6 /K and continuous service reaches 600 C (Tg 717 C), which is what drives its use where no alkali ion migration into TFT or sensor layers matters.

What do mems devices programs usually order?

Cap wafers, TGV substrates, motion-sensor lids. Typical spec: TTV < 3 um, bow < 20 um, SEMI flats.

Is there a minimum order for alkali-free glass for mems devices?

No. Single prototypes are accepted, and pricing steps down at 10, 100 and 1,000 pieces.

How fast can prototypes ship?

Machined prototypes ship in 5 – 10 working days. Coated or bonded parts add 1 – 2 weeks depending on queue slots.

Specifications on this page were last reviewed by our engineering team in August 2026.

Configure in 3D, draw in 2D

3D Model & 2D Drawing Builder

PRECISION GLASS 3D
3D Precision Glass Configurator Build a visual 3D preview for custom precision glass parts, including wafers, microfluidic chips, coated glass, optical filters, and machined quartz plates. This tool is for visual configuration only. Final dimensions, tolerances, materials, coatings, and manufacturability will be reviewed from your drawing or specification.
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Glass Wafer Builder

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FREQUENTLY ASKED QUESTIONS
Which fused silica grade should I choose — JGS1, JGS2 or JGS3?

JGS1 offers deep-UV transmission from about 185 nm (best for DUV lithography and UV laser optics). JGS2 transmits well from about 220 nm for standard UV-visible use at lower cost. JGS3 is optimized for visible-to-infrared and high-power laser work. The builder exposes a transmission-band requirement so you can specify the grade by application.

What wafer diameters and thicknesses are supported?

Common diameters are 2, 3, 4 and 6 inch (note 1 inch = 25.0 mm for quartz wafers, so a 4 inch wafer is 100 mm). Typical thicknesses are 200, 500, 700 and 1000 µm, with tighter thickness tolerance and TTV specifiable for polished optical grades.

Can I specify TTV, surface quality and a flat or notch?

Yes. You can set total thickness variation, scratch-dig surface quality (down to 40/20 or 20/10 for optical grade), single- or double-side polish, and a primary flat or notch for orientation.

Need a different product family? Open the full 3D + 2D builder.

Engineering Review

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