Quartz Glass for Semiconductor Equipment

Quartz Glass for Semiconductor Equipment: Quartz Glass, CTE 0.59 x 10^-6 /K. No MOQ, prototypes in 5-10 days, DFM review with every RFQ.

Industry Application July 28, 2026

Quartz Glass for Semiconductor Equipment – Quartz Glass (CTE 0.59 x 10^-6 /K, 260 nm – 2.5 um). No minimum order; DFM review included with every RFQ.

What quartz glass for semiconductor equipment actually buys from a glass shop: view ports, wafer carriers, plasma rings, chamber windows. The requirement underneath is plasma-resistant, particle-clean quartz and fused silica hardware. Quartz Glass is the fit here because it offers fused from natural quartz crystal.

Key parameters

Material Quartz Glass (GE214-equivalent, semiconductor grade)
Thermal expansion (CTE) 0.59 x 10^-6 /K
Service temperature 1,050 C continuous
Transmission range 260 nm – 2.5 um
Density 2.20 g/cm3
Knoop hardness 500 kg/mm2
Refractive index 1.459 @ 587 nm
Stock thickness 0.20 – 60 mm
Maximum blank size 450 mm diameter
RFQ inputs PDF/DXF/STEP drawing, quantity brackets, surface and edge spec

DFM notes from the shop floor

The shop-floor rules that matter here:

  • Material note: natural-quartz batches vary in metallic ppm, so semiconductor lots need certs per melt.
  • Over-specification is the quiet budget killer: a 20/10 scratch-dig face costs roughly three times an 80/50 face, so grade each surface individually.

The full rules live in our tolerance design guide and holes and edges design guide.

Manufacturing capability

One material, many routes: on Quartz Glass we also quote laser cutting, etching, cnc machining, lapping, and multi-step drawings are the norm rather than the exception.

Application context

The recurring buyers of quartz glass for semiconductor equipment: semiconductor equipment (view ports, wafer carriers, plasma rings, chamber windows); laboratory instruments (cuvettes, sight glasses, stir-cell windows). Background reading on the underlying material science: ScienceDirect: quartz glass.

Dimensions still moving? Configure this part live in the 3D + 2D builder below, or open the full custom glass machining 3D + 2D builder to start from a blank canvas.

Useful companion pages: precision glass grinding, ultra-thin quartz discs, ultra-thin glass materials.

Frequently asked questions

How does Quartz Glass behave under heat?

CTE is 0.59 x 10^-6 /K and continuous service reaches 1,050 C continuous, which is what drives its use where fused from natural quartz crystal matters.

What do semiconductor equipment programs usually order?

View ports, wafer carriers, plasma rings, chamber windows. Typical spec: metallic impurities certified per melt, Ra < 0.8 um sealed faces.

Is there a minimum order for quartz glass for semiconductor equipment?

No. Single prototypes are accepted, and pricing steps down at 10, 100 and 1,000 pieces.

How fast can prototypes ship?

Machined prototypes ship in 5 – 10 working days. Coated or bonded parts add 1 – 2 weeks depending on queue slots.

What files do you need for a quote?

A dimensioned PDF plus DXF or STEP geometry. If only a sketch exists, our drawing review service formalizes it before quoting.

Specifications on this page were last reviewed by our engineering team in August 2026.

Configure in 3D, draw in 2D

3D Model & 2D Drawing Builder

PRECISION GLASS 3D
3D Precision Glass Configurator Build a visual 3D preview for custom precision glass parts, including wafers, microfluidic chips, coated glass, optical filters, and machined quartz plates. This tool is for visual configuration only. Final dimensions, tolerances, materials, coatings, and manufacturability will be reviewed from your drawing or specification.
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FREQUENTLY ASKED QUESTIONS
Which fused silica grade should I choose — JGS1, JGS2 or JGS3?

JGS1 offers deep-UV transmission from about 185 nm (best for DUV lithography and UV laser optics). JGS2 transmits well from about 220 nm for standard UV-visible use at lower cost. JGS3 is optimized for visible-to-infrared and high-power laser work. The builder exposes a transmission-band requirement so you can specify the grade by application.

What wafer diameters and thicknesses are supported?

Common diameters are 2, 3, 4 and 6 inch (note 1 inch = 25.0 mm for quartz wafers, so a 4 inch wafer is 100 mm). Typical thicknesses are 200, 500, 700 and 1000 µm, with tighter thickness tolerance and TTV specifiable for polished optical grades.

Can I specify TTV, surface quality and a flat or notch?

Yes. You can set total thickness variation, scratch-dig surface quality (down to 40/20 or 20/10 for optical grade), single- or double-side polish, and a primary flat or notch for orientation.

Need a different product family? Open the full 3D + 2D builder.

Engineering Review

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